Fabrication Of NiFe Films For Magnetic Detection
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
In some magnetic devices, for example bubble domain sensors, very thin layers of NiFe are used. It is very difficult to fabricate very thin NiFe layers having thicknesses of the order of 100 angstroms with good magnetic and magnetoresistive properties. For example, when these films are deposited by evaporation, it is difficult to control the composition accurately and the reproducibility is often poor. When the NiFe films are RF sputtered, good sensors result, but there is often interfacial mixing at the NiFe film-substrate interface. This mixing increases the resistivity of the NiFe film, and the resulting magnetoresistive effect is reduced.