Cooled Rotatable And Adjustable Radio Frequency Cathode In A Thin Film Evaporator
Original Publication Date: 1979-Feb-01
Included in the Prior Art Database: 2005-Feb-19
A cathode sputtering system is described which facilitates thin film deposition by providing a cooled and rotatable cathode in a thin film evaporator. The device includes a processing chamber 10 having a cooled, rotatable wafer-retaining structure 12 mounted therein. Structure 12 includes two adjustable arms 14, 16 each of which is adapted to receive and retain a wafer nest. 'Structure 12 is rotatably mounted within chamber 10 by means of a drive shaft 18 powered by a drive dome 20.