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The drawing illustrates an enhanced particulate inspection tool that can differentiate between metallic and nonmetallic surface particulates as well as imbedded metallic particles.
English (United States)
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Oblique Light Tool
The drawing illustrates an enhanced particulate inspection tool that can
differentiate between metallic and nonmetallic surface particulates as well as
imbedded metallic particles.
A silicon wafer, which may have surface particles or other contamination, is
mounted on a ring holder 1 for inspection. The wafer is illuminated first by an
oblique light 2, similar to existing tools where the light is in the visible spectrum
and illuminates the wafer from an angle such that surface particles can scatter
light at other than the incident angle. This particulate scattered light is sensed
by an optical video scanner 4, and the image is stored. The wafer is then
illuminated by an infrared (IR) source 3 from the backside, where the infrared
radiation is focused on the wafer and passes through except where metallic
particulates exist. The resulting image is captured by an infrared scanner 5, and
is also stored.
A video processing unit 6 then takes the two images and displays the oblique
light image as yellow and the IR image as blue on the color television monitor 7
at the same time.
On the television screen surface particles will appear yellow if transparent to
infrared, but green if metallic and opaque to infrared. Subsurface metallic
particles will appear blue, as will backside metallic particles. Therefore, it
becomes easy to separate surface metallics from organic and oxide, silicon and
nitride contaminations during analysis.