Fluidic Tester For Wafer Air Chuck
Original Publication Date: 1979-Feb-01
Included in the Prior Art Database: 2005-Feb-19
The operation of a wafer air chuck 1 (Fig. 1) can be controlled by a fluidic tester 2 (Fig. 2) so as to move an edge notched wafer 3 from the position shown in full line in Fig. 1 to the position shown in dotted line, where the wafer is then angularly oriented, centered, held in a position during which time measurements can be made on the wafer, and then released so as to return to the full-line position.