Method For Making Three Dimensional Microstructures in Silicon, Particularly a Buried Oxide Structure For Bipolar Integrated Circuits
Original Publication Date: 1979-Feb-01
Included in the Prior Art Database: 2005-Feb-19
Conventional techniques for etching silicon, such as reactive ion etching, ion milling, isotropic or anisotropic etching, are capable of making vertical or near vertical walled holes or trenches only. These techniques cannot be used to dig "tunnels" which are required to make truly three dimensional microstructures.