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Laser Engineering Change Capability For Microcircuit Metallurgy

IP.com Disclosure Number: IPCOM000066381D
Original Publication Date: 1979-Feb-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Braslau, N Von Gutfeld, RJ [+details]

Abstract

The line geometry for fast circuits is a microstrip transmission line consisting of a metal line (width less than or approximately equal to 10 micrometers) above a conducting ground plane separated by a thickness approximately 0.3 micrometers, giving a characteristic impedance approximately 10 ohms, as illustrated in Fig. 1. Crossovers can be made which give x-y wiring capability, as shown in Fig. 2. Connections can be made simply and fast using suitably focused pulsed laser beams, as shown in Fig. 3.