Laser Engineering Change Capability For Microcircuit Metallurgy
Original Publication Date: 1979-Feb-01
Included in the Prior Art Database: 2005-Feb-19
The line geometry for fast circuits is a microstrip transmission line consisting of a metal line (width less than or approximately equal to 10 micrometers) above a conducting ground plane separated by a thickness approximately 0.3 micrometers, giving a characteristic impedance approximately 10 ohms, as illustrated in Fig. 1. Crossovers can be made which give x-y wiring capability, as shown in Fig. 2. Connections can be made simply and fast using suitably focused pulsed laser beams, as shown in Fig. 3.