Browse Prior Art Database

Integrated Anemometer Structure

IP.com Disclosure Number: IPCOM000066386D
Original Publication Date: 1979-Feb-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Matino, H [+details]

Abstract

This article describes an integrated anemometer structure with integrated sensor and control circuits on a chip by using porous silicon dioxide (SiO(2)) technology.