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Subcollector Capping

IP.com Disclosure Number: IPCOM000066469D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
McKenna, CM Winnard, JR [+details]

Abstract

A process is described whereby the adverse effects of the present epitaxial process upon the highly doped subcollector region (sometimes referred to as winging or autodoping) is minimized or eliminated.