Method Of Characterizing Probe Points
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20
The "footprint" of probe points used for the electrical testing of semiconductor materials is easily obtained by pressing the probes into a deformable material such as porous silicon. For example, the tips of lightly loaded (1-5 grams) spreading resistance probes can be characterized in this manner.