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Method Of Characterizing Probe Points Disclosure Number: IPCOM000066484D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20

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Gorey, EF Poponiak, MR [+details]


The "footprint" of probe points used for the electrical testing of semiconductor materials is easily obtained by pressing the probes into a deformable material such as porous silicon. For example, the tips of lightly loaded (1-5 grams) spreading resistance probes can be characterized in this manner.