Process For Introducing And Removing A Diffusion Boat From A Diffusion Tube
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20
The aim is to assure a nitrogen cushion under the silicon diffusion boat during the thermal diffusion or oxidation processing steps, in order to avoid any contact between the diffusion tube and the boat. This technique avoids the main contamination source of the silicon wafers disposed in the boat, because at any introduction or removal of the boat the friction between the boat and the tube produces silica dust, which, in turn, results in bright points on the wafers. Additionally, the lifetime of the diffusion tube is increased.