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Multilayer Glass Module Disclosure Number: IPCOM000066508D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20

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Franz, K Kaus, G Pilgram, H [+details]


To increase the performance of LSI (large-scale integration) circuits, the latter are arranged on a multilayer quartz glass substrate, as quartz glass has a lower dielectric constant than ceramic materials, and the signal speed is higher, the lower the dielectric constant of the substrate material.