Rotatable Wafer Chuck For Testing
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20
For testing integrated circuits, semiconductor wafers are placed on the the surface of a vacuum chuck which is mounted on an X/Y carriage for sequentially contacting different circuits. During testing, a constant temperature is maintained by heating or cooling the chuck. To solve the contacting problems arising from the increased IC (integrated circuit) density, it is desirable to rotate the chuck by 360'. Such a rotatable chuck has flexible electrical and pneumatic connections arranged in different planes of the assembly.