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Cleaning Of Permalloy Mask After Exposure To Chlorine RIE System

IP.com Disclosure Number: IPCOM000066587D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Zarowin, CB [+details]

Abstract

A substrate 12 (Fig. 1) is coated with a thin film of gold 11, which is coated with a permalloy (nickel-iron, 80-20) film 10 having a cylindrical opening 13. Films 10 and 11 are used to form a mask 15 (Fig. 2).