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Sputtering FeCoCr Thin Film Magnetic Media

IP.com Disclosure Number: IPCOM000066590D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Klokholm, E Tan, SI [+details]

Abstract

This is a method for RF sputter deposition of thin films of FeCoCr with magnetic properties suitable for magnetic recording media. The requirements for magnetic recording media are: (1) H(c), 300-500 oersteds; (2) film thickness, 200-400 angstroms; (3) 4PiM(s) > 14,000 gauss; (4) squareness ratio > 0.9; and (5) high corrosion resistance (high Cr content).