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Reinforced Membraneous Substrates

IP.com Disclosure Number: IPCOM000066594D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Broers, AN Cuomo, JJ Laibowitz, RB Molzen, WW [+details]

Abstract

The development of hihg resolution electron beam lithograpy has also led to the development of thin, window-like (membraneous) substrates. An example of such a substrate is shown in Fig. 1. This type of substrate minimizes back-scattered electrons which limit resolution. In addition, such substrates are very useful for TEM (transmission electron microscopy) examinations. A severe disadvantage with such a substrate is that it can be quite fragile. After the high resolution device is made on the top surface of the window, the substrate must be handled, bonded, wired, and subjected to wide temperature changes. These temperature changes have resulted in broken windows. In addition, the windows or membranes may be inadvertently thinned and weakened by various processing steps.