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Gettering Oxygen At Low Temperatures

IP.com Disclosure Number: IPCOM000066609D
Original Publication Date: 1979-Mar-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Libertini, SH Tu, KN [+details]

Abstract

The common and effective method of reducing the partial pressure of oxygen in an annealing furnace filled with inert gas is to flow the gas through an oxygen getter before entering the furnace. Typically, the getter contains Ti particles and is kept at 900 degrees C. Oxygen will react with the Ti, forming oxides at the high temperature, and as a result the oxygen partial pressure in the gas can be reduced below 10/-9/ torr. However, high temperature gettering is not economical and consumes a lot of energy. Disclosed here is a new method of using new material to getter oxygen very effectively at a much lower temperatures.