Triple Hearth Triple Filament Pivoting E-Gun Source
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20
The disclosed electron beam gun (E-gun) is used for evaporation of thin film metallurgy for semiconductor device fabrication. Some product types require in situ evaporation of three different metals with phasein (co-evaporation) at the interface of each layer, and the vapor stream must be at the normal angle of incidence to the product surface. The disclosed triple-hearth triple-filament pivoting E-gun was developed to meet these requirements.