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Triple Hearth Triple Filament Pivoting E-Gun Source

IP.com Disclosure Number: IPCOM000066696D
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Dahlke, GP Palella, AL Prizzia, TC [+details]

Abstract

The disclosed electron beam gun (E-gun) is used for evaporation of thin film metallurgy for semiconductor device fabrication. Some product types require in situ evaporation of three different metals with phasein (co-evaporation) at the interface of each layer, and the vapor stream must be at the normal angle of incidence to the product surface. The disclosed triple-hearth triple-filament pivoting E-gun was developed to meet these requirements.