System To Satisfy The Residual First Quartz Process Requirement
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20
An algorithm for end-point detection is described in the IBM Technical Disclosure Bulletin 20, 113-138 (June 1977). Described herein is an algorithm which makes it possible to quench a quartz via etch process at a precise time, which leaves the required amount of quartz at an endpoint detect test site.