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System To Satisfy The Residual First Quartz Process Requirement Disclosure Number: IPCOM000066701D
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20

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Ananthakrishnan, RB [+details]


An algorithm for end-point detection is described in the IBM Technical Disclosure Bulletin 20, 113-138 (June 1977). Described herein is an algorithm which makes it possible to quench a quartz via etch process at a precise time, which leaves the required amount of quartz at an endpoint detect test site.