Browse Prior Art Database

Mechanism Free Target Disk For Centrifugal Holding Of Wafers During Ion Implantation

IP.com Disclosure Number: IPCOM000066714D
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Bayer, EH Kranik, JR Mueller, WF [+details]

Abstract

A method and apparatus are described for holding wafers during ion implantation by high current ion implanters. It eliminates the need for a complex wafer return mechanism such as that described in U.S. Patent 3993018.