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Software To Detect Measuring Tool Malfunctions Automatically

IP.com Disclosure Number: IPCOM000066732D
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Ananthakrishnan, RB [+details]

Abstract

The author earlier (*) described a method of extracting the film thickness information under the assumption that the order numbers at successive extrema differ by 1. Frequently, during on-line operation, it is necessary to automatically detect a faulty condition in the measuring tool used or in a product wafer, as, for example, in the use of an uncalibrated variable wavelength filter.