Software To Detect Measuring Tool Malfunctions Automatically
Original Publication Date: 1979-Apr-01
Included in the Prior Art Database: 2005-Feb-20
The author earlier (*) described a method of extracting the film thickness information under the assumption that the order numbers at successive extrema differ by 1. Frequently, during on-line operation, it is necessary to automatically detect a faulty condition in the measuring tool used or in a product wafer, as, for example, in the use of an uncalibrated variable wavelength filter.