Browse Prior Art Database

Diode Field Stabilizer

IP.com Disclosure Number: IPCOM000066874D
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Brooks, GA Brown, DK Johnson, C Schmitt, GW [+details]

Abstract

The use of an aluminum ring around the cathode in a diode etching chamber increases the load capability of the chamber by enhancing field uniformity.