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Diode Field Stabilizer Disclosure Number: IPCOM000066874D
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20

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Brooks, GA Brown, DK Johnson, C Schmitt, GW [+details]


The use of an aluminum ring around the cathode in a diode etching chamber increases the load capability of the chamber by enhancing field uniformity.