Method Of Making A Pellicle
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20
A thin, two-micron membrane 1 for making a pellicle is locked between two rings 2 and 3 (Fig. 1). Membrane 1 is then stretched over the top of mounting ring 4 (Fig. 2) which is attached to spacer 5 and bonded to ring 4. Guide pin 6 positions ring 3 in the correct position.