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Method Of Making A Pellicle Disclosure Number: IPCOM000066894D
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20

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Scully, RJ Shea, V Wojcik, W [+details]


A thin, two-micron membrane 1 for making a pellicle is locked between two rings 2 and 3 (Fig. 1). Membrane 1 is then stretched over the top of mounting ring 4 (Fig. 2) which is attached to spacer 5 and bonded to ring 4. Guide pin 6 positions ring 3 in the correct position.