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Functional Dew Point Measurement In A Sintering Furnace

IP.com Disclosure Number: IPCOM000066899D
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Eggerding, CL Niklewski, JB [+details]

Abstract

Close control of the dew point and the flow rate of the atmosphere around ceramic substrates during sintering is important because variations in the flow and dew point influence critical parameters.