Browse Prior Art Database

Method Of Selectively Changing Refractive Indices Of Passivating Materials By Means Of Ion Implantation

IP.com Disclosure Number: IPCOM000066903D
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Malin, K Schmitt, A [+details]

Abstract

Ions of heavy metals, such as chromium, titanium or zirconium, are implanted into layers of passivating materials, for example, SiO(2), covered with appropriate masking patterns, thus changing the refractive indices of these materials.