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Ion Source With Directly DC Heated LongLife Cathode

IP.com Disclosure Number: IPCOM000066904D
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Hinkel, H Kraus, G Schmid, GE [+details]

Abstract

Ion sources with a directly DC heated, rod-shaped cathode, arranged in a discharge chamber serving as an anode, have the disadvantage that the cathode is prematurely destroyed by unilateral sputter erosion. This unilateral erosion is caused, in the last resort, by the magnetic field generated by the cathode current.