Ion Source With Directly DC Heated LongLife Cathode
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20
Ion sources with a directly DC heated, rod-shaped cathode, arranged in a discharge chamber serving as an anode, have the disadvantage that the cathode is prematurely destroyed by unilateral sputter erosion. This unilateral erosion is caused, in the last resort, by the magnetic field generated by the cathode current.