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Dicyanoacetylene monomer was prepared from acetylenedicarboxylic acid dimethylester using modifications of existing literature procedures.
English (United States)
This text was extracted from a PDF file.
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Scanning Electron-Beam-Induced Polymerization Of Dicyanoacetylene On
Dicyanoacetylene monomer was prepared from acetylenedicarboxylic acid
dimethylester using modifications of existing literature procedures.
Two aluminum wafers were placed in the vacuum system and exposed to
scanning electron beams in the following ways: One was exposed for a line
pattern, and the other was exposed in a total area coverage. A blank experiment
was also carried out to insure that no pattern could be seen except when
dicyanoacetylene was first condensed on the substrate.
The exposure was carried out as follows: After loading a wafer, the system
was evacuated to a pressure of 1x10/-6/ torr. The substrate holder was then
cooled with liquid nitrogen for about 10 minutes to insure temperature
equilibration. The dicyanoacetylene was allowed to condense on the substrate at
a pressure of about 4 x 10/-6/ torr for 2 minutes. The line pattern was then
written on the substrate with a Varian Auger gun. The beam conditions were 5.0x10/-8/ amp at 3 KeV. The sweep covered 2 cm in 7 seconds. Typically, 200-
micron-wide lines were formed for a wider line. This amounts to 9x10/-6/
coul/cm/2/. The same procedure was used for the area coverage except
overlapping lines were used to insure total coverage. The blank experiment was
run under the same conditions as the line sample except no dicyanoacetylene
was condensed on the sample after cooling.