Modulated Beam Mass Spectrometer For Gas Sampling
Original Publication Date: 1979-May-01
Included in the Prior Art Database: 2005-Feb-20
Described herein is a method for measuring and controlling the composition of a gas mixture at pressures above that where a mass spectrometer can be used to directly measure the partial pressures of the component gases, i.e., above about 7E-3 Pascal (5E-5 torr). Control of partial pressure, as opposed to the total pressure, can be especially important when, for example, a small concentration of a reactive gas, such as oxygen, is mixed with an inert gas, such as argon, and this mixture is used in a reactive environment.