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Electron Beam Measurement With On-Line Calibration

IP.com Disclosure Number: IPCOM000067055D
Original Publication Date: 1979-Jun-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Moore, RD O'Neill, BC Pfeiffer, HC Weber, EV [+details]

Abstract

A technique is described for elimination of the normal errors of drift and ambient influence which restrict accuracy of absolute measurements using electron beams.