Automatic Serialization of Chips For Identification and Traceability
Original Publication Date: 1979-Jun-01
Included in the Prior Art Database: 2005-Feb-20
A direct-writing electron-beam exposure system provides the capability of exposing identification data on individual exposure sites. Such data may identify the chip part number, wafer lot, wafer number, chip location on the wafer, and other control information. Data which is known at the time that the numerical-control (N/C) drive code is generated, may be included therein; however, wafer lot wafer number and other control information is generally unknown at the time that the N/C code is prepared, and of course, chip identification varies from site to site on the wafer. The N/C code to expose such variable data may be created dynamically by the controller or control computer and inserted at appropriate locations in the stream of data controlling the exposure.