Browse Prior Art Database

Convertible Wafer Size Gripper Assembly

IP.com Disclosure Number: IPCOM000067063D
Original Publication Date: 1979-Jun-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Hansen, HE Polonck, SJ [+details]

Abstract

The gripper assembly shown and the unassociated transport assembly (not shown) provide the means to pickup wafers 15 from an orientor unit and precisely position the wafers in the respective processing positions. Precise positioning of the wafer is often required for proper processing.