Laser Engraving of Transparent Gadolinium Gallium Garnet Wafers
Original Publication Date: 1979-Jun-01
Included in the Prior Art Database: 2005-Feb-20
Transparent gadolinium-gallium-garnet (GGG) wafers are engraved with a Nd:YAG laser by the following method. The GGG wafer 10 is placed on top of a substrate 12 made of a material that absorbs the Nd:YAG laser 14, for example, a sintered A1203 material containing 10 to 40% TiC. The Nd:YAG laser scriber unit is activated to engrave the A1203-TiC material. The heat generated by the vaporization of the A1203-TiC material is trapped between the two surfaces, and an engraved mirror-image of the characters is generated on the underside of the transparent GGG wafer.