Browse Prior Art Database

High Capacity Metal Deposition Wafer Domes

IP.com Disclosure Number: IPCOM000067270D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Curry, WJ Dahlke, GP Galyon, GT McCollum, JM [+details]

Abstract

Disclosed is a high capacity wafer deposition dome that provides critical deposition angles and source-to-substrate distances.