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Disclosed is a high capacity wafer deposition dome that provides critical deposition angles and source-to-substrate distances.
English (United States)
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100% of the total text.
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High Capacity Metal Deposition Wafer Domes
Disclosed is a high capacity wafer deposition dome that provides critical
deposition angles and source-to-substrate distances.
Semiconductor wafers are loaded on the wafer dome 2. A DC voltage is
applied to the dome through a dome adapter 4. An inner dome shield 3 acts to
absorb heat both from sputtering and deposition, and concentrates the DC
plasma on the masked wafer. The inner dome shield 3 and the outer dome
shield 1 are electrically isolated from the wafer dome 2 so that these surfaces do
not sputter, thereby effectively providing the desired removal rate with less power
and heat dissipation.
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