Browse Prior Art Database

Wafer Transport For Infrared Analysis

IP.com Disclosure Number: IPCOM000067284D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Guggenheim, RC Westdorp, WA [+details]

Abstract

A wafer transport apparatus locates the wafer and permits the accurate measurement of the wafer thickness at the infrared (IR) measuring sites in the determination of oxygen and carbon concentrations in silicon.