High-Accuracy Photolithographic Mask
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20
Integrated-circuit chips often contain an array of identical cells surrounded by irregularly shaped peripheral circuits; dense monolithic memories are an example. Some of the structural dimensions within a cell may be critical for the performance of the whole chip. Therefore, it is necessary to control these dimensions within the cell as such and to ensure that maximum homogeneity exists among the different array cells.