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High-Accuracy Photolithographic Mask

IP.com Disclosure Number: IPCOM000067300D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Heimeier, H Kiink, E Rudolph, V Wernicke, F [+details]

Abstract

Integrated-circuit chips often contain an array of identical cells surrounded by irregularly shaped peripheral circuits; dense monolithic memories are an example. Some of the structural dimensions within a cell may be critical for the performance of the whole chip. Therefore, it is necessary to control these dimensions within the cell as such and to ensure that maximum homogeneity exists among the different array cells.