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Fabrication Of Holes in Silicon Disclosure Number: IPCOM000067395D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

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Related People

Lahiri, SK [+details]


In the fabrication of electrical devices, it is often necessary to drill small holes or cavities in materials such as silicon. This article shows how a large number of such holes can be cut in silicon in a relatively short time.