Browse Prior Art Database

Fabrication Of Holes in Silicon

IP.com Disclosure Number: IPCOM000067395D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Lahiri, SK [+details]

Abstract

In the fabrication of electrical devices, it is often necessary to drill small holes or cavities in materials such as silicon. This article shows how a large number of such holes can be cut in silicon in a relatively short time.