IR Alignment Of Two Or More Opaque Silicon Wafers
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20
Fig. 1 of the IBM Technical Disclosure Bulletin 19, 372 (June 1976) shows a pair of wafers 1 containing cavities 2 which must be fused or onded together so that mercury may be retained in cavities 2. The present article shows a method of aligning the wafers 1 which contain cavities 2 by illuminating the pair of wafers from below with an infrared (IR) source and viewing cavities 2 as alignment targets with an infrared microscope.