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IR Alignment Of Two Or More Opaque Silicon Wafers

IP.com Disclosure Number: IPCOM000067402D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Kolb, GA Sokolowski, J [+details]

Abstract

Fig. 1 of the IBM Technical Disclosure Bulletin 19, 372 (June 1976) shows a pair of wafers 1 containing cavities 2 which must be fused or onded together so that mercury may be retained in cavities 2. The present article shows a method of aligning the wafers 1 which contain cavities 2 by illuminating the pair of wafers from below with an infrared (IR) source and viewing cavities 2 as alignment targets with an infrared microscope.