Browse Prior Art Database

Depth Profiling Of Structure And/Or Composition On Thin Films By Synchrotron Radiation

IP.com Disclosure Number: IPCOM000067405D
Original Publication Date: 1979-Jul-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Eastman, D Tu, KN [+details]

Abstract

A method for determining the structure and/or composition of thin films as a function of depth of penetration is described.