Browse Prior Art Database

High Efficiency Short Time Optical Hardening

IP.com Disclosure Number: IPCOM000067469D
Original Publication Date: 1979-Aug-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Kaplan, LH Viswanathan, NS Zimmerman, SM [+details]

Abstract

Patterned resist images flow during postbaking causing dimensional and profile changes. Images can be thermally stabilized by exposure to low wavelength (2537 A) ultraviolet in the presence of either CF(4) or CFC1(2)CF(2)C1 (FREON TF*), but this has required exposure times of 12 to 20 minutes.