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Long-Term Stability Calibration Standard For Submicron Air Gaps

IP.com Disclosure Number: IPCOM000067500D
Original Publication Date: 1979-Aug-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Korth, HE [+details]

Abstract

Optical methods of measuring submicron air gaps require calibration standards, the long-term stability of which exceeds one nanometer, to correlate different measuring techniques and to check long-term repeatability.