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Thickness Monitor For Plated Film

IP.com Disclosure Number: IPCOM000067559D
Original Publication Date: 1979-Aug-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Lang, PC Lin, CC [+details]

Abstract

The thickness of a film 1 that is being plated is monitored by the use of a monitor film 2 and reference film 3, disposed in a plating solution 4 contained in a tank 5.