Browse Prior Art Database

ARC Melting Technique For Fabricating Small Sputtering Targets

IP.com Disclosure Number: IPCOM000067589D
Original Publication Date: 1979-Aug-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Gambino, RJ McCullough, KJ Ruf, RR [+details]

Abstract

Sputtering targets in the shape of small arc melted buttons have seen increasing use for quick surveying of new alloy systems or when the constituents are scarce or expensive. To mount the buttons to the sputtering electrode, a rod or screw must be inserted into the button. This can be done by electrical discharge machining (EDM) with a spark in oil to form a threaded hole into the button. This is time consuming, expensive, and tends to contaminate the target with oil. It is preferred to attach the rod during the arc melting procedure. A small mounting rod is usually inserted in the button while it is molten by inserting the 1/8" diameter tungsten arc melting electrode slightly beneath the molten surface immediately after the arc is quenched.