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Nonerodible Metal Masking For Fabrication Of High Efficiency Solar Cells

IP.com Disclosure Number: IPCOM000067691D
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Brooks, GA Johnson, C [+details]

Abstract

Nonreflective semiconductor surfaces for solar cells having a more uniform P/N junction in the silicon are prepared by a plasma etching process in a diode configured reactor. A nonerodible metal mask, such as chrome, is used in the texturing process.