Photoresist Stripping With In Situ Silicon Oxide Cleanup
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20
Photoresist stripping by plasma O(2) can result in a growth of Si(x)O(y) if bare regions of silicon, such as a contact surface, are exposed. The silicon oxide formed in the contact hole prevents overlying materials from making contact and also behaves as a diffusion barrier. Thus, when a doped polycrystalline silicon film is deposited and heat treated, diffusion from the doped polycrystalline silicon to the substrate, in the contact hole region, does not occur. The barrier silicon oxide formed during plasma stripping of photoresist prevents the formation of a buried contact.