Method Of Selectively Masking Chip Surfaces During Conformal Coating By Vapor Deposition
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20
Construction of a module whose interior is filled with a reactive or conductive cooling medium requires that sensitive metallurgies and components be protected by a conformal coating. An effective method of applying a continuous barrier layer is to vapor deposit a material such as parylene.