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Method And Apparatus For Efficient Control Of Charged Particles

IP.com Disclosure Number: IPCOM000067705D
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Muir, AW Rogoyski, J Ryan, PM Weber, EV [+details]

Abstract

Earlier work [1,2,3] has dealt with techniques and equipment for controlling a fixed shape electron beam applied to the exposure of images in electron-sensitive materials as used in semiconductor manufacturing processes.