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Digital Van Der Pauw Measurement Device

IP.com Disclosure Number: IPCOM000067753D
Original Publication Date: 1979-Sep-01
Included in the Prior Art Database: 2005-Feb-20

Publishing Venue

IBM

Related People

Authors:
Gruber, PA Kawai, NJ [+details]

Abstract

Semiconductor resistivity and Hall effect measurements of the Van der Pauw (VDP) type may be made by digital processing of a plurality of incremental data readings on a single sample.