Single Photoresist For Polyimide-Insulator Via
Original Publication Date: 1979-Oct-01
Included in the Prior Art Database: 2005-Feb-20
Vias formed through polyimide and insulator layers, such as quartz or silicon nitride, require two photoresist layers to open a large polyimide window and a smaller insulator window. A single photoresist layer is used for etching both windows for vias between metal layers.