Process For SBD Metallurgies
Original Publication Date: 1979-Oct-01
Included in the Prior Art Database: 2005-Feb-20
Figs. 1-5 illustrate the steps of a process for forming low barrier Schottky barrier diodes (SBDs). The process includes a blanket-depositing of a low barrier metal (e.g. Ta, TiW) on clean silicon through a suitable mask (e.g., silicon oxide, silicon nitride or a composite thereof), as shown in Fig. 1.