Schottky Barrier Diode Process
Original Publication Date: 1979-Oct-01
Included in the Prior Art Database: 2005-Feb-20
Conventional lift-off processes, as, for example. for fabricating Schottky barrier diodes (SBDs) utilizing a silicon oxide/silicon nitride coating, may have a reliability exposure resulting from the entrapment of residual organic (from the lift-off structure) under the nitride ledge, as shown in Fig. 1.