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This optical device combines an upper image 5 and a lower image 6 on a screen 10 for the purpose of testing masks used in semiconductor manufacturing.
English (United States)
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This optical device combines an upper image 5 and a lower image 6 on a
screen 10 for the purpose of testing masks used in semiconductor
The prism arrangement that combines the two images is made by
interleaving thin (1 mil.) layers of glass 2 and 4, one layer 4 to reflect the image 5
onto the screen 10 and the other layer 2 to reflect the image 6 onto the screen 10. This arrangement permits only half of the light from the images 5 and 6 to
reach the screen, but this is less loss then occurs with partial mirror systems.
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